Sputtering targets

 

 

 

NiSi4,5

3N5

 

 

 

 

 

 

Metals

Alloys

Precious metals

Non-metals

Al

5N, 5N5

 

AlCu0.5

5N5

 

Ag

4N

 

Al2O3

4N

Cr

3N5

 

AlCu4

5N5

 

Au

4N

 

Ge

5N

Cu

4N5

 

AlSi0.5

5N5

 

AuZn3

4N

 

ITO (IN2O3/SNO2) 90/10, 97/3

4N

Hf

3N7

 

AlSi1

5N5

 

Pt

3N5, 4N

 

NbO2

3N5

In

4N

 

AlSi1Cu0.5

5N5

 

Pd

3N5, 4N

 

Nb2O5

3N

Mo

3N5

 

CrNi30

3N

 

 

 

 

Si

5N, 6N

Nb

3N

 

CrNi40

3N

 

 

 

 

SiO2

4N

Ni

3N5

 

CrNi50

3N

 

 

 

 

GaZO (ZNO/GA2O3)

3N

Sn

4N5

 

MoSi2

2N

 

 

 

 

 

 

Ta

3N, 3N5, 4N

 

NiCr20

3N

 

 

 

 

 

 

Ti

3N, 4N5

 

NiFe18

3N

 

 

 

 

 

 

W

3N5, 5N

 

NiFe19

3N

 

 

 

 

 

 

Zn

3N

 

NiFe21.5

3N

 

 

 

 

 

 

Zr

2N2

 

NiFe55

3N

 

 

 

 

 

 

 

 

 

NiV7

3N5

 

 

 

 

 

 

 

 

 

WTi

4N5

 

 

 

 

 

 

 

 

 

AlSc

3N5

 

 

 

 

 

 

About sputtering targets

Umicore is a leading producer of all kind of sputtering targets for PVD applications in a variety of industries.
Sputtering targets can be produced for many different equipment manufacturers such as Evatec, Applied Materials, SPTS, Ulvac and many more. A selection of our target materials is listed above with the respective standard purity.

For an inquiry please make a selection below:

Make your selection

 
Bonding technologies available: (depending on material selection)
  • Indium bonded,
  • explosion welded,
  • roll cladding,
  • elastomer bonding, ...
Tool manufacturer (Sputtering tool) 
  • Anelva (Anelva)
  • Applied Materials (Endura)
  • Balzers/BPS/Unaxis/Oerlikon/Evatec (LLS, Clusterline, Radiance, Sputron)
  • FHR (FHR)
  • LH (PK200, PK500, PK750)
  • MRC (Eclipse)
  • NEXX (Nimbus/M4/Appollo)
  • NMC (NMC)
  • SPTS/AVIZA/TRIKON/ET (Sigma/FxP)
  • VON ARDENNE (VON ARDENNE)
  • ...
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