0481569

Specifications

Coating material

Yttrium oxide

Purity

99.99%

Form

Tablets

Dimensions

Ø 9.5 x 5 mm

Quantity

500 g

Theoretical density at 20°C

5.0 g/cm3

Melting point

2410 °C

Temperature at vapor pressure

10-2 mbar

~ 2300 °C

10-1 mbar

~ 2700 °C

Boiling point

4300-4440 °C

Type of evaporation

Melting

Possible

Sublimation

Possible

Evaporation source (typically)

E-gun

Liner material

W

Good

Mo

Good

Boat

Boat material

W

Possible

Specific evaporation conditions

Preparation of base melt (premelt)

Possible

Reactive gas pressure

Good

Substrate temperature range

100 - 200 °C

Good

200 - 300 °C

Good

Film transparency

Low

< 0.25 µm

High

10-12 µm

Film refractive index n / extinction coefficient k

at 550nm

n

1.78-1.87

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