0481513

Specifications

Coating material

Tantalum oxide

Purity

99.99%

Form

Granulate

Dimensions

0.7 – 3.5 mm

Quantity

100 g

Theoretical density at 20°C

8.2 g/cm3

Melting point

1862-1880 °C

Temperature at vapor pressure

10-2 mbar

2000 °C

10-1 mbar

2200 °C

Type of evaporation

Melting

Good

Evaporation source (typically)

E-gun

Directly from Cu crucible

Good

Liner material

W

Good

Mo

Good

Boat

Boat material

W

Possible

Specific evaporation conditions

Preparation of base melt (premelt)

Possible

Reactive gas pressure

Good

Substrate temperature range

100 - 200 °C

Good

200 - 300 °C

Good

Ion or plasma assistance

Desirable / indispensible

Good

Film transparency

Low

0.35 µm

High

10 µm

Film refractive index n / extinction coefficient k

at 550nm

n

2.07-2.13

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